Precision Glass Substrates

Polished glass substrates for photomasks, reticles and patterned optical components.

Polished glass for the next process

A precision glass substrate is a polished, unpatterned base for later coating or optical patterning. Its surface supports the film while its geometry locates the eventual component within an instrument or process fixture.

Choose the product around the substrate, coating, pattern and exposure conditions that the finished component must support.

Precision Glass Substrates
Product type
Optical glass substrate
Pattern route
Drawing-defined configuration
Primary definition
Material, geometry and surface follow the drawing
Order basis
Approved drawing and inspection plan

A stable starting point for patterned glass

Start with the job the component must perform, then confirm the material and geometry that make the result repeatable.

Define the optical interface

The substrate sets the optical path, dimensional base and surface condition for the process that follows.

Separate component and system values

Material, coating and pattern tolerances describe the component. Exposure performance and system accuracy also depend on the instrument, process and mounting.

Keep the next process predictable

The supplied geometry, surface condition and inspection records are reviewed around the actual process instead of a generic product name.

Technical specifications

Choose the supply stage that matches the processes you perform in-house: bare glass before coating, chromium-coated glass before resist coating, or a resist-coated plate before exposure.

Product technical specifications
PropertySpecification
PropertyMaterialSpecificationSynthetic fused silica / B270 / soda-lime glass
PropertySquare formatsSpecification3 / 4 / 6 / 7 / 8 / 9 in
PropertyThicknessSpecification≥0.3 mm
PropertyTotal thickness variation (TTV)Specification≤2 µm
PropertyFlatnessSpecification≤2 µm

Applications and selection

Choose the supply stage that matches the processes you perform in-house: bare glass before coating, chromium-coated glass before resist coating, or a resist-coated plate before exposure.

  • Photomask and reticle fabrication
  • Calibration targets and imaging references
  • Encoder discs and patterned optical components
  • Photomask and reticle fabrication
  • Calibration and imaging targets
  • Encoder discs and patterned glass components

Customize around the process

Material, dimensions, surface, pattern, coating and documentation can be reviewed together when the standard configuration is not enough.

Material and geometry

Glass type and optical transmission

Surface and optical behaviour

Size, thickness, flatness and tolerances

Documentation and packaging

Surface quality, edge finish and clear aperture

Where this product is used

Common questions

Short answers to the questions that affect material choice, pattern definition and acceptance.

What is a precision glass substrate?

It is a polished, unpatterned glass component prepared for a later coating or patterning process.

Can the substrate be supplied without a chrome layer?

Yes. Uncoated polished substrates can be specified when the next process will be performed separately.

Which specifications should be included?

Provide material preference, dimensions, thickness, flatness, surface quality, edge condition and any clear-aperture requirement.

Acceptance and drawing inputs

Confirm these items after the product type and core parameters are selected. They define how the finished component is manufactured, checked and documented.

Inspection and acceptance

Inspect the finished component against the approved drawing and agreed acceptance plan.

What to provide in the drawing or inquiry

  • Glass type and optical transmission
  • Size, thickness, flatness and tolerances
  • Surface quality, edge finish and clear aperture
  • Cleaning, packaging and inspection records

Send the drawing, reference artwork or preliminary specification for manufacturing and inspection review.

Discuss this product

Selection notes

Precision glass substrates are dimensioned and surface-finished glass parts for subsequent coating, photolithography or optical assembly.

Select material, thickness, total thickness variation and flatness together. The outer dimensions define the equipment fit; the clear aperture defines the usable optical or processing area.

Information for your inquiry

Glass grade, outline or diameter, thickness, clear aperture, edge finish, TTV and flatness.

How does bare glass differ from a resist-coated chrome plate?

Bare glass has neither chromium nor photoresist. A resist-coated plate already has the film stack needed for a compatible exposure process. Choose the supply state for the next operation you will perform.

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