Define the optical interface
The coating stack must suit the exposure wavelength, patterning route and inspection method that follow.
Chrome-Coated Photomask Blanks
Chrome-coated glass blanks prepared for photolithographic patterning and custom photomask fabrication.
A controlled base for chrome patterning
Also described as chrome-on-glass blanks, they are supplied before the final pattern transfer step. The blank is defined by the substrate, chromium film, optical density or reflectivity target, surface condition and the photoresist process that will follow.
Choose the product around the substrate, coating, pattern and exposure conditions that the finished component must support.
- Product type
- Chrome-coated glass blank
- Pattern route
- Drawing-defined configuration
- Primary definition
- Material, geometry and surface follow the drawing
- Order basis
- Approved drawing and inspection plan
Prepare the surface for reliable pattern transfer
Start with the job the component must perform, then confirm the material and geometry that make the result repeatable.
Separate component and system values
Material, coating and pattern tolerances describe the component. Exposure performance and system accuracy also depend on the instrument, process and mounting.
Keep the next process predictable
The supplied geometry, surface condition and inspection records are reviewed around the actual process instead of a generic product name.
Technical specifications
Choose the supply stage that matches the processes you perform in-house: bare glass before coating, chromium-coated glass before resist coating, or a resist-coated plate before exposure.
| Property | Specification |
|---|---|
| PropertyProduct type | SpecificationUnpatterned chrome-coated photomask blank |
| PropertySubstrate | SpecificationGlass or fused silica, as specified |
| PropertyChrome layer | SpecificationSputtered or deposited chromium; thickness to specification |
| PropertyOptical behavior | SpecificationOptical density, reflectivity or contrast target to process |
| PropertySurface | SpecificationFlatness, surface quality, cleanliness and edge condition |
Applications and selection
Choose the supply stage that matches the processes you perform in-house: bare glass before coating, chromium-coated glass before resist coating, or a resist-coated plate before exposure.
- Laser direct-write photomasks
- Contact and proximity exposure
- Microfabrication and optical pattern transfer
- Laser direct-write photomask fabrication
- Contact or proximity photolithography
- Microfabrication and precision pattern transfer
Customize around the process
Material, dimensions, surface, pattern, coating and documentation can be reviewed together when the standard configuration is not enough.
Substrate and geometry
Substrate material, size and thickness
Chrome or resist stack
Chrome thickness, optical density and reflectivity
Optical and inspection requirements
Photoresist compatibility and coating condition
Where this product is used
Chrome-coated starting material when resist coating follows separately.
Common questions
Short answers to the questions that affect material choice, pattern definition and acceptance.
What is a chrome-coated photomask blank?
It is an unpatterned glass or fused silica substrate with a chromium film, supplied for a later patterning process.
Does the blank include a photoresist layer?
It can be supplied with or without photoresist, depending on the required process route.
Can the chrome layer be made for laser writing?
Yes. The coating and resist route should be specified around the laser direct-write process.
Acceptance and drawing inputs
Confirm these items after the product type and core parameters are selected. They define how the finished component is manufactured, checked and documented.
Inspection and acceptance
Inspect the finished component against the approved drawing and agreed acceptance plan.
What to provide in the drawing or inquiry
- Substrate material, size and thickness
- Chrome thickness, optical density and reflectivity
- Photoresist compatibility and coating condition
- Inspection, cleaning and protective packaging
Send the drawing, reference artwork or preliminary specification for manufacturing and inspection review.
Discuss this productSelection notes
Chrome-coated photomask blanks are polished substrates with an unpatterned chromium film for subsequent pattern fabrication.
Match the substrate and plate format to the chromium stack, optical density, defect grade and any required photoresist coating.
Information for your inquiry
Substrate, plate dimensions, chromium and optical requirements, downstream resist process, defect grade and quantity.
Does a chrome blank already contain my pattern?
No. A blank provides a uniform film. Compatible resist coating, exposure, development and etching create the pattern. Supply artwork when ordering a finished patterned component.